Rectangular Voice Coil Motors Long Travel Linear Motors For Semiconductor Industry
Place of Origin | china,Suzhou |
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Brand Name | SUPT MOTION |
Certification | CE, ISO9001 |
Model Number | VCAS0013-0343-00A |
Minimum Order Quantity | 1PCS |
Price | $115-$170 |
Packaging Details | Customized packaging etc. |
Delivery Time | 1-5pcs ,5 days . >20pcs ,To be negotiated |
Payment Terms | T/T |
Supply Ability | To be negotiated |

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xVoltage | 12.6V | Noise Level | Low |
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Weight | 40g | Keywords | Voice Coil Actuator |
Stroke | 34.3mm | Use | BOAT, Car, Medical Respirator, Microscope, Optics, Optical Lens, Laser Equipment |
Speed(RPM) | Variable Speed | Sizes(mm) | 68.3*6.*34.8 |
Peak Force(N) | 13 | ||
Highlight | Semiconductor Industry Linear Motors,Rectangular Voice Coil Motors,Long Travel Linear Motors |
Product Description:
The VCAS series rectangular actuators offer lower thrust per unit weight than cylindrical actuators, but have a longer stroke and a range of thrusts up to 1000N and 250mm.The VCAS series of rectangular actuators are an ideal solution for X-Y axis motion, with the semiconductor and micro-machine tool industries as their primary markets.
Rectangular voice coil motors linear motors offer the advantages of fast response, precise control and no contact friction. Next, let's talk about how they are used in semiconductor equipment:
Their rectangular voice coil motors play a vital role in semiconductor manufacturing equipment, such as in photolithography machines for adjusting the precise position of lenses and mirrors in the optical system.
Photolithography is a key equipment in the semiconductor manufacturing process for transferring circuit patterns onto silicon wafers. The photolithography process requires extreme precision and fast response. Rectangular voice coil motors linear motors with high acceleration, precise position control and wear-free motion are ideally suited for use in lithography alignment and scanning systems.
In wafer handling: Rectangular voice coil motors linear motors are used in wafer dicing, packaging and testing processes for precise position control and fast response; in wafer handling processes, accurate and fast movement of wafers is required. Voice coil motors provide frictionless linear motion to ensure highly accurate positioning.
Product Parameters:
Product Model | Peak Force (N) |
Continuous Force at 25℃(N) |
Total Stroke (mm) |
Max Voltage (V) |
Back EMF Constant (V/m/s) |
Weight of the coil (g) |
Length (mm) |
Width (mm) |
Height (mm) |
VCAS0002-0498-00A | 2.1 | 1.3 | 50 | 11.3 | 1.3 | 15 | 72 | 42.6 | 33 |
VCAS0002-0747-00A | 2.1 | 1.3 | 74.7 | 11.3 | 1.3 | 15 | 100.5 | 42.6 | 37 |
VCAS0006-0030-00A | 6.1 | 3.2 | 3 | 13.3 | 4.6 | 18.2 | 25.1 | 34.1 | 27 |
VCAS0006-0099-00A | 6.1 | 3.2 | 10 | 13.7 | 4.6 | 18.2 | 33.5 | 34.1 | 26.9 |
VCAS0013-0343-00A | 13 | 8 | 34.3 | 12.6 | 5.8 | 40 | 68.3 | 60 | 34.8 |
VCAS0065-1000-00A | 65 | 22.4 | 100 | 28.7 | 9.7 | 135 | 170 | 59.6 | 81.9 |
Application:
The main application of a voice coil motor: |
1.Semiconductor industry:Wiring, cutting, drilling, transportation systems, welding, robotics. |
2.Valve operation in the field:Type metering valves, pressure test systems, pneumatic valve chemistry injection system. |
3.Micro Machine industry:Feed systems, micro drilling, precision stamping. |
4.Vibration System:Shaking table, vibration platform. |
5.Medical field:Micro-injection system, respiratory equipment, testing equipment. |
6.Aviation Technology:Flight control system, pilot feedback system. |
7.Commercial use field:Computer cooling pump miniature camera auto focus system. |
8.Automation industry:Laser equipment, dispenser, test equipment, textile machinery. |