High Speed VCM Voice Coil Motor For Photolithography Machine In Semiconductor Manufacturing

Product Description:

The VCAR series of Cylindrical Actuators constitute nearly 80% of the market ,they can productce a high force with a high acceleration rates.Peak Forces range for 0.7N to 3000N.Typically ,their stroke length is less than 50mm .

Voice coil motors have the following applications in the semiconductor equipment field:
Dispenser: In the semiconductor packaging process, the dispenser needs to accurately control the position and amount of glue. Voice coil motors can accurately control the movement of the dispensing head to achieve high-precision dispensing operations to ensure the quality of semiconductor chip packaging.
Lead Wire Bonding Machine: Used to connect the pins on the chip with the pins on the package substrate, it requires high positioning accuracy and movement speed. Voice coil motors can provide fast and precise motion control to ensure the quality and efficiency of lead bonding.
PCB Drilling Machines: During the manufacturing process of printed circuit boards, drilling operations are required. Voice coil motors can control the movement of the drilling head to realize high precision drilling and improve the processing accuracy and quality of PCB.
Photolithography machine: Photolithography machine is one of the core equipments for semiconductor manufacturing, which requires very high precision and speed of motion control. Voice coil motors are used in lithography to control the motion of mask table and wafer table to ensure the precision and efficiency of lithography.
Wafer pick and place: In the production process of semiconductor wafers, it is necessary to pick and place wafers. Voice coil motors can provide precise motion control to ensure the safe and accurate pick and place of wafers and improve production efficiency.

Features:

High response, high acceleration, low mass coils.
No cogging effect, zero hysteresis.
Simple structure, light weight, high frequency response, smooth operation.
Stroke: 1mm-60mm
Thrust: 0.5N-3000N

Product Parameters:

Product Applications:

The motors are mainly used in medical, semiconductor, aerospace and automotive applications, including valve actuators, small precision replacement gauges, vibration platforms and active vibration damping systems, among many others. The markets are mainly in the medical, semiconductor, aerospace and automation industries.